APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR SINGLE CRYSTAL INGOT USING CUSP MAGNETIC FIELD

摘要

PURPOSE: An apparatus and a method for manufacturing a semiconductor single crystal an ingot using cusp magnetic field are provided to improve the productively of single crystal by securing a process margin. CONSTITUTION: A semiconductor single crystal ingot manufacturing device comprises magnetic field supply unites(80a, 80b). The magnetic field supply unites are arranged near a crucible(10). The magnetic field supply unites have the center of ZGP(Zero Gauss Plane) of -30mm ~ 60mm in relation to the high level interface. In this case, the central location of ZGP has the vertical component of the magnetic field of 0. The magnetic field supply unites applies a CUSP magnetic field having a R over 1.