| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic levitation pump device for achieving highly accurate measurement of positional information on an impeller in a pump chamber and stable magnetic levitation of the impeller. Ž<P>SOLUTION: This magnetic levitation pump device 1 controls an electric current Im of an electromagnet 31 based on an output signal of a magnetic sensor 222 arranged in close vicinity to the electromagnet 31 for a magnetic bearing, and limits an upper limit value of output of a PID compensator 224 by a limit circuit 210. Thus, a maximum value of a drift in sensor output can be limited, and accurate positional information on the impeller 23 can be provided. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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