发明名称 |
METHOD OF MANUFACTURING MOUNTING STRUCTURE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRO-OPTICAL DEVICE |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a mounting structure allowing mounting of a semiconductor device on a substrate without leaving large stress on the substrate; a method of manufacturing an electro-optical device; and an electro-optical device. <P>SOLUTION: The method of manufacturing an electro-optical device 100 executes: a first step ST1 of heating a thermosetting resin included in an anisotropic conductive film 91 to a temperature above a setting temperature while pressurizing an IC chip 40 by a press-bonding head 60 when mounting the IC chip 40 on an element substrate 10; a second step ST2 of cooling the thermosetting resin; and a third step ST3 of heating a resin layer to a temperature without exceeding a glass transition temperature again. Accordingly, stress remaining in the element substrate 10 in a stage in which the second step ST2 has been finished can be eliminated in the third step ST3. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010034356(A) |
申请公布日期 |
2010.02.12 |
申请号 |
JP20080195845 |
申请日期 |
2008.07.30 |
申请人 |
EPSON IMAGING DEVICES CORP |
发明人 |
NAKAZAWA MASAHIKO |
分类号 |
H01L21/60;G02F1/1345 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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