发明名称 METHOD OF MANUFACTURING MOUNTING STRUCTURE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRO-OPTICAL DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a mounting structure allowing mounting of a semiconductor device on a substrate without leaving large stress on the substrate; a method of manufacturing an electro-optical device; and an electro-optical device. <P>SOLUTION: The method of manufacturing an electro-optical device 100 executes: a first step ST1 of heating a thermosetting resin included in an anisotropic conductive film 91 to a temperature above a setting temperature while pressurizing an IC chip 40 by a press-bonding head 60 when mounting the IC chip 40 on an element substrate 10; a second step ST2 of cooling the thermosetting resin; and a third step ST3 of heating a resin layer to a temperature without exceeding a glass transition temperature again. Accordingly, stress remaining in the element substrate 10 in a stage in which the second step ST2 has been finished can be eliminated in the third step ST3. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010034356(A) 申请公布日期 2010.02.12
申请号 JP20080195845 申请日期 2008.07.30
申请人 EPSON IMAGING DEVICES CORP 发明人 NAKAZAWA MASAHIKO
分类号 H01L21/60;G02F1/1345 主分类号 H01L21/60
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