| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide structure effectively avoiding deterioration in performance in the horizontal direction of a vibration control mount disposed between a surface plate and a base by the existence of a leveling unit even if vibration is inputted to a horizontal plane. Ž<P>SOLUTION: In the levelling unit in the vibration control mechanism, a rolling device 30 as a mechanism permitting horizontal movement is disposed between a pneumatic actuator 2 and the surface plate 6. An upper bearing washer 32 and a lower bearing washer 34 in the rolling device 30 can be relatively and freely moved in a horizontal direction through a plurality of steel balls 36 which are circularly arranged. The bearing washers 32, 34 and the retainer 38 are applied with centering by attraction among magnetic poles of three permanent magnets 40, 42, 44 disposed at central parts of the bearing washers 32, 34 and a retainer 38 while preventing free separation of the bearing washers 32, 34 and the retainer 38 from each other. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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