| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inkjet head drive part and its manufacturing method. Ž<P>SOLUTION: The inkjet head drive part includes an oscillation plate having an upper surface on which a groove is formed, a first electrode formed to cover a bottom surface and sidewalls of the groove, a piezoelectric element formed on the first electrode so as to fill the groove, and a second electrode formed on the piezoelectric element. The inkjet head drive part is provided with a thin-film piezoelectric element and an oscillation plate and has a large oscillation displacement and a low drive voltage. The manufacturing method of the inkjet head drive part is also provided. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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