| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas analyzer and gas analysis method for securing a signal to noise ratio and the stability of detection, in detecting a plurality of gas concentrations of one-time wavelength scan. SOLUTION: When the concentrations of hydrogen chloride (HCl) and water vapor (H<SB>2</SB>O) are detected by one-time wavelength scan, for example, a switching timing control circuit 3 controls the switching timing so that a change-over switch 7 is switched off to on, at a timing exceeding the light-absorbing wavelength by water vapor H<SB>2</SB>O, and the wavelength offset amount from an offset generating circuit 6 is added to the wavelength to scan, namely, the driving current of a semiconductor laser 5. Thus, since the variations in the wavelength scan can be moderated near the light absorption spectrum of each of water vapor (H<SB>2</SB>O) and hydrogen chloride (HCl), the variation in 2f component detection signal can be moderated, the signal to noise ratio and stability of detection can be secured. COPYRIGHT: (C)2010,JPO&INPIT |
