| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fluid controller capable of accurate control, by eliminating play caused between parts in a stage of assembling the fluid controller. Ž<P>SOLUTION: The fluid controller 1 is composed of a fluid controller body 2 and a support tool 3 for pinching the fluid controller body 2 from both upper and lower sides. The support tool 3 is composed of a placing plate 11 fixed to a fluid controller arranging surface, a pair of columns 12 fixed to the placing plate 11, and an actuator cap 13 fixed to an upper end part of the pair of columns 12. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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