| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejection head which, even when kogation matter is accumulated on a protective film of a substrate for a recording head, can reliably remove the matter and can improve adhesion between the protective layer on the substrate and a resin layer. SOLUTION: An upper protective layer 107 comes into contact with the resin layer constituting a flow path forming member such as an ejection port and comes into contact with ink on a heat generation part in a formed flow path in a substrate for a recording head. The upper protective layer 107 contains Ir and Si, that is, the upper protective layer is constituted such that, on the contact surface between the ink and the resin layer, Ir<SB>100-X</SB>Si<SB>X</SB>satisfies an Si content of 20 at.%≤X≤30 at.%, wherein the Si content comes to X=0 as approaching an adhesion layer 109. As the result, on the interface where the upper protective layer comes into contact with the flow path forming member, the Si content described above is satisfied and, therefore, the adhesion with the path forming member made of resin can be improved as compared with the case of using Ir alone. COPYRIGHT: (C)2010,JPO&INPIT |
