| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid ejection head capable of preventing destruction such as crack or peeling of a film and improving a piezoelectric characteristic, a liquid ejection device and a piezoelectric element. <P>SOLUTION: This liquid ejection head includes a pressure generation chamber 12 communicating with a nozzle opening 21, a first electrode 60, a piezoelectric material layer 70 formed on the first electrode 60, a second electrode 80 formed on the piezoelectric material layer 70 at the side opposite to the first electrode 60, and a piezoelectric element 300 for generating a pressure change in the pressure generation chamber 12. The first electrode 60 includes platinum and titanium oxide. A rate of a part of a crystal form having a rutile structure in the titanium oxide is 76.5 mol% or more. <P>COPYRIGHT: (C)2010,JPO&INPIT |
