| 摘要 |
A facility for depositing lubricant coatings on hard magnetic disks includes load and unload vacuum locks in which cassettes carrying hard magnetic disks to be coated with a lubricant coating are turned 90° Lubricant coatings are simultaneously deposited on a plurality of hard magnetic disks in a process module. Plural cassettes carrying the hard magnetic disks are simultaneously located in the load and unload vacuum locks. Plural cassettes carrying the hard magnetic disks are simultaneously located in a buffer zone between a load vacuum lock and the module for depositing the lubricant coatings.
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