| 摘要 |
(0051] THE PRESENT INVENTION IS DIRECTED TO A MATERIAL FOR USE IN IMPRINT LITHOGRAPHY THAT FEATURES A COMPOSITION HAVING A VISCOSITY ASSOCIATED THEREWITH AND INCLUDING A SURFACTANT, A POLYMERIZABLE COMPONENT, AND AN INITIATOR RESPONSIVE TO A STIMULI TO VARY THE VISCOSITY IN RESPONSE THERETO, WITH THE COMPOSITION, IN A LIQUID STATE, HAVING THE VISCOSITY BEING LOWER THAN ABOUT 100 CENTIPOISES, A VAPOR PRESSURE OF LESS THAN ABOUT 20 TORR, AND IN A SOLID CURED STATE A TENSILE MODULUS OF GREATER THAN ABOUT 100 MPa, A BREAK STRESS OF GREATER THAN ABOUT 3 MPa AND AN ELONGATION AT BREAK OF GREATER THAN ABOUT 2%. |
