发明名称 TRANSPORT POD INTERFACE
摘要 <p>The invention relates to a transport pod (1) interface (6) including a sampling probe (15) intended to be connected to a gas analyser and an actuator (7) which can be coupled to a door (5) providing access to the transport pod (1) in a coupling position and which can move the door (5) towards a base (14) of the interface (6) in a retracted position in which the volume of gas to be analysed, contained in the transport pod (1), can be accessed by the sampling probe (15). The invention is characterised in that the interface includes at least one seal (31) arranged so as to provide a seal between the actuator (7) and the base (14) at least in the retracted position, such as to isolate the volume of gas to be analysed.</p>
申请公布号 KR20100016177(A) 申请公布日期 2010.02.12
申请号 KR20097022973 申请日期 2008.04.21
申请人 ALCATEL LUCENT 发明人 GODOT ERWAN
分类号 H01L21/677;H01L21/673 主分类号 H01L21/677
代理机构 代理人
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