发明名称 Etchant composition, and methods of patterning conductive layer and manufacturing flat panel display device using the same
摘要 An etchant composition, and methods of patterning a conductive layer and manufacturing a flat panel display device using the same are provided. The etchant composition may include phosphoric acid, nitric acid, acetic acid, water and an additive, wherein the additive includes a chlorine-based compound, a nitrate-based compound, and an oxidation regulator. In addition, the flat panel display device may be manufactured by patterning a gate electrode, source/drain electrodes and a pixel electrode using the same etchant composition. The gate electrode, source/drain electrodes and the pixel electrode may be formed of different conductive materials. Accordingly, processes are simplified so that manufacturing costs may be reduced and productivity may be improved.
申请公布号 US2010032613(A1) 申请公布日期 2010.02.11
申请号 US20090461202 申请日期 2009.08.04
申请人 LEE KYOUNG MOOK;SONG KYE CHAN 发明人 LEE KYOUNG MOOK;SONG KYE CHAN
分类号 C09K13/04;C09K13/00 主分类号 C09K13/04
代理机构 代理人
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