发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 To provide a semiconductor device that has an improved adhesion between a bottom conductive layer and a protection film protecting an MTJ element. This semiconductor device includes a bottom electrode formed over a semiconductor substrate, an MTJ element part formed over a part of the bottom electrode by lamination of a bottom magnetic film, an insulating film, a top magnetic film, and a top electrode in this order, and a protection film formed over the bottom electrode so as to cover the MTJ element part, wherein the bottom electrode is formed by amorphized metal nitride and the protection film is formed by an insulating film containing nitrogen.
申请公布号 US2010032779(A1) 申请公布日期 2010.02.11
申请号 US20090474974 申请日期 2009.05.29
申请人 RENESAS TECHNOLOGY CORP. 发明人 TSUKAMOTO KEISUKE;TSUJIUCHI MIKIO
分类号 H01L29/82;H01L21/28 主分类号 H01L29/82
代理机构 代理人
主权项
地址