<p>A reactor made of carbon which is to be used for conducting the vapor-phase reaction of chlorosilane with hydrogen at high temperatures. It is characterized by comprising a reaction vessel and, disposed in the vessel, a packing member which is made of carbon and forms a gas passage for disturbing a flow of a gas mixture of chlorosilane and hydrogen, the surface of the packing member made of carbon being coated with a silicon carbide film.</p>
