| 摘要 |
A solar battery etching method using vaporation etching and an etching apparatus for performing the same are provided to perform an etching process by contact with a selicon wafer through vaporation of a solution, thereby providing low and uniform reflectance. An etching apparatus of a solar battery comprises a lid part(112) which has chemical resistance and heat resistance and is combined in an upper portion of a main body(110) having chemical resistance and heat resistance. In the inner center of the lid part, a carrier(116) is formed. In the central part of the main body, an etching container(118) in which an etching solution(120) having hydrofluoric acid(HF) and nitric acid(HNO3) as main components is filled is protruded upwardly. |
