Inspection apparatus of a probe card and Method thereof,申请号KR20080001129-传众专利搜索

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发明名称	Inspection apparatus of a probe card and Method thereof
摘要
申请公布号	KR100942064(B1)	申请公布日期	2010.02.11
申请号	KR20080001129	申请日期	2008.01.04
申请人		发明人
分类号	G01R31/02;H01L21/66	主分类号	G01R31/02
代理机构		代理人
主权项
地址

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