| 摘要 |
<p>An inspection system (100) and the like that can calculate data for the inspection with high S/N ratio and high accuracy or any other data with enhanced degree of flexibility. For such a purpose, the inspection system (100) adjusts imaging timing to synchronize a time period inwhich a projected image of an object W on an imaging device (22) moves by m pixels (m is an integer of 1 or more) in the X direction with an imaging time interval, and identifies each partial image data obtained by imaging the same inspection positions on the object W from each two-dimensional image data obtained by imaging at each imaging timing in accordance with a fact that the object W appears in a state of shifting by m pixels in the X direction in each two-dimensional image data. On the basis of each partial image data, the inspection data is generated for which noise reduction processing is applied at the inspection positions.</p> |
