VORRICHTUN ZUM EINTRAGEN, EINSPRITZEN ODER EINSPRÜHEN EINER MISCHUNG AUS EINEM TRÄGERGAS UND FLÜSSIGEN VERBINDUNGEN UND VERFAHREN ZUR VERWENDUNG DER VORRICHTUNG

摘要

The invention relates to a device for introducing (1) a carrier gas (2) and liquid compounds (3) or a liquid solution into an evaporation chamber (4), comprising a mixing chamber (10), including at least: -a first inlet (8) for the admission of said compounds or said solution (3), -a second inlet (9) for the admission of the carrier gas (2), -and an outlet (13) connected to an inlet of an injector (14), so that a mixture of carrier gas and droplets of said compounds or of said solution is periodically injected, through a single injector outlet (14), into the evaporation chamber (4).