| 摘要 |
#CMT# #/CMT# Apparatus for galvanizing one side of a substrate, in a processing chamber with anodes (6) and circulating electrolyte (8), has a component (2) consisting of an anode support (3) for receiving soluble anode material (or an insoluble anode), a central free space (3) and (as upper part) operating device(s) (5) for adjusting shut-off of electrolyte flow through the chamber via the anode support and free space. #CMT# : #/CMT# Apparatus for galvanizing one side of a substrate, in a processing chamber with soluble or insoluble anodes (6) and an electrolyte (8) circulating through the chamber, has a component (2) consisting of an anode support (3) for receiving soluble anode material (or an insoluble anode) and having a central free space (3). The electrolyte-permeable upper part of the component consists of operating device(s) (5) for adjusting shut-off of the flow of electrolyte through the chamber via the anode support and free space. An independent claim is included for a corresponding galvanization method using the apparatus, in which varying current conditions are set on the surface to be electrochemically treated during galvanization of the article and demetallization of the article support, by variation of the volume flow of the circulating electrolyte (8) and by constructional features of the component (2). #CMT#USE : #/CMT# Especially for galvanizing one side of a wafer, solar cell or hybrid substrate (claimed). The apparatus is typically in cup, fountain or cell plater form. #CMT#ADVANTAGE : #/CMT# A homogeneous layer thickness distribution is obtained. Soluble or insoluble anodes are utilized economically. Servicing operations can be almost completely automated. Complete cleaning or demetallization of the articles surfaces and cathodic contacts is possible. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The figures show cross-sectional and plan views of a component of galvanization apparatus, having a stable, exchangeable operating device in diffuser form and an anode support filled with loose, soluble anode material. 2 : Galvanization apparatus component 3 : Anode support, in basket form 4 : Free space 5 : Operating device, in diffuser form 6 : Loose, soluble anode material 7 : Flow direction 8 : Electrolyte 9 : Anode supporting base 10 : Maximum filling height 11 : Bolt 12 : Anode contact 13 : Anode cover 14 : Anode support wall 15 : Reinforcing fins 16 : Handle of component 18 : Opening 25 : Tube, as wall of free space #CMT#METALLURGY : #/CMT# Preferred Apparatus: The operating device (5) is a plastics or metal fabric, acting as a diffuser, flow adjuster, distributor, membrane or separator, and is firmly connected to the component (2), e.g. by welding, adhering or screwing. The cross-section of the component (2) is adapted to that of the processing chamber, and is specifically round, square or quadrangular. At least one opening (18) is present in the free space wall (25) at the upper seal of the free space (4). A handle (16) is provided for manual or automatic insertion and removal of the component. Anode contacts (12) are present on an electrically conductive anode supporting base (9) or on an insoluble anode, and anode covers (13) electrically contact the anode (6). At least one liquid-permeable operating device is self-supporting or located in a supporting frame; and/or removable for servicing. The anode supporting base is removable for servicing. The operating device optionally has non-linear electrolyte permeability transverse to the permeable surface. The cross-section of the free space in the center of the anode support is 2-40 (preferably 5-15)% of that of the processing chamber. Preferably soluble anode is stored in loose form in a support (3) in the form of a metal or plastics basket. The component (2) (including the operating device) is specifically in the form of an illumination device (e.g. incandescent, luminescent, halogen or discharge lamp or LED); or of an anode screen for modulating the electric field at the article. Preferred Process: During galvanization the adapted volume flow below the operating device (5) through the openings (18) provides an almost constant static pressure in the electrolyte (8), causing a constant electrolyte flow via the operating device in the processing chamber and in the vicinity of the article. |
