| 发明名称 |
PROBES FOR SCANNING PROBE MICROSCOPY |
| 摘要 |
Disclosed are probes for scanning probe microscopy comprising a semiconductor heterostructure and methods of making the probes. The semiconductor heterostructure determines the optical properties of the probe and allows for optical imaging with nanometer resolution.
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| 申请公布号 |
US2010032719(A1) |
申请公布日期 |
2010.02.11 |
| 申请号 |
US20080248652 |
申请日期 |
2008.10.09 |
| 申请人 |
HONG SEUNGHUN;KIM TAEKYEONG |
发明人 |
HONG SEUNGHUN;KIM TAEKYEONG |
| 分类号 |
H01L21/20;H01L29/205 |
主分类号 |
H01L21/20 |
| 代理机构 |
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代理人 |
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