LOADLOCK CHAMBER WITH HIGH-LOW, RIGHT-LEFT ISOLATED PROCESSING AREAS FOR DOUBLE LOADING/UNLOADING,申请号KR20070139793-传众专利搜索

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发明名称	LOADLOCK CHAMBER WITH HIGH-LOW, RIGHT-LEFT ISOLATED PROCESSING AREAS FOR DOUBLE LOADING/UNLOADING
摘要
申请公布号	KR100941934(B1)	申请公布日期	2010.02.11
申请号	KR20070139793	申请日期	2007.12.28
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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