| 摘要 |
Embodiments of the present invention relate to apparatus and method for supporting and transferring large area substrate in a vacuum condition. One embodiment of the present invention provides an apparatus comprising one or more end effectors having a plurality of end effector pads disposed thereon without mechanically joining to the one or more end effectors. In one embodiment, a plurality of end effector pad assemblies are coupled to one or more end effectors by magnetic force.
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