发明名称 Component Comprising a Thin-Film Transistor and CMOS-Transistors and Methods for Production
摘要 An electrical component, in the crystalline semiconductor body of which several CMOS transistors in high-voltage or low-voltage technology are formed. The individual CMOS transistors are separated from one another by insulation regions. On one insulation region, a thin-film transistor is formed, having a gate that is realized simultaneously with the gates of the CMOS transistors from the same polysilicon layer. The gate oxide of the thin-film transistor, just like a second polysilicon layer for source drain and body of the thin-film transistor, can be produced together with the structural elements already present in the CMOS process.
申请公布号 US2010032675(A1) 申请公布日期 2010.02.11
申请号 US20070375529 申请日期 2007.07.25
申请人 AUSTRIAMICROSYSTEMS AG 发明人 ENICHLMAIR HUBERT
分类号 H01L27/105;H01L21/8238 主分类号 H01L27/105
代理机构 代理人
主权项
地址