| 摘要 |
P-polarized light beam passing through an ftheta lens passes through a polarization beam splitter, is converted into S-polarized light beam by a quarter-wave plate and a reflecting mirror, re-enters the polarization beam splitter, and is reflected at the polarization beam splitter in the -Z direction. An optical path of a light beam between a polygon mirror and the ftheta lens, between the ftheta lens and the polarization beam splitter, between the polarization beam splitter and the quarter-wave plate, between the quarter-wave plate and a reflecting mirror, between the reflecting mirror and the quarter-wave plate, and between the quarter-wave plate and the polarization beam splitter are in the same plane.
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