发明名称 |
RADIATION-SENSITIVE RESIN COMPOSITION, SPACER FOR LIQUID CRYSTAL DISPLAY ELEMENT, PROTECTIVE FILM, AND METHOD FOR PRODUCING SPACER FOR LIQUID CRYSTAL DISPLAY ELEMENT OR PROTECTIVE FILM |
摘要 |
<p>Disclosed is a radiation-sensitive resin composition containing a copolymer[A]of an unsaturated carboxylic acid and/or unsaturated carboxylic acid anhydride and an unsaturated compound different from them, a polymerizable unsaturated compound[B], a radiation-sensitive polymerization initiator[C]and a nitroxyl compound[D]such as bis(1-oxyl-2,2,6,6-tetramethylpiperidin-4-yl)sebacate. This radiation-sensitive resin composition has excellent resolution performance and enables to form a fine pattern.</p> |
申请公布号 |
KR20100014852(A) |
申请公布日期 |
2010.02.11 |
申请号 |
KR20097017775 |
申请日期 |
2008.02.26 |
申请人 |
JSR CORPORATION |
发明人 |
NAGAYA KATSUYA;SAKAI TAKAHIRO;ICHINOHE DAIGO;HAMAGUCHI HITOSHI |
分类号 |
G03F7/028;G02F1/1339;G03F7/004 |
主分类号 |
G03F7/028 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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