发明名称 RADIATION-SENSITIVE RESIN COMPOSITION, SPACER FOR LIQUID CRYSTAL DISPLAY ELEMENT, PROTECTIVE FILM, AND METHOD FOR PRODUCING SPACER FOR LIQUID CRYSTAL DISPLAY ELEMENT OR PROTECTIVE FILM
摘要 <p>Disclosed is a radiation-sensitive resin composition containing a copolymer[A]of an unsaturated carboxylic acid and/or unsaturated carboxylic acid anhydride and an unsaturated compound different from them, a polymerizable unsaturated compound[B], a radiation-sensitive polymerization initiator[C]and a nitroxyl compound[D]such as bis(1-oxyl-2,2,6,6-tetramethylpiperidin-4-yl)sebacate. This radiation-sensitive resin composition has excellent resolution performance and enables to form a fine pattern.</p>
申请公布号 KR20100014852(A) 申请公布日期 2010.02.11
申请号 KR20097017775 申请日期 2008.02.26
申请人 JSR CORPORATION 发明人 NAGAYA KATSUYA;SAKAI TAKAHIRO;ICHINOHE DAIGO;HAMAGUCHI HITOSHI
分类号 G03F7/028;G02F1/1339;G03F7/004 主分类号 G03F7/028
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