发明名称 Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel
摘要 Plasma ignition and cooling apparatus and methods for plasma systems are described. An apparatus can include a vessel and at least one ignition electrode adjacent to the vessel. A total length of a dimension of the at least one ignition electrode is greater than 10% of a length of the vessel's channel. The apparatus can include a dielectric toroidal vessel, a heat sink having multiple segments urged toward the vessel by a spring-loaded mechanism, and a thermal interface between the vessel and the heat sink. A method can include providing a gas having a flow rate and a pressure and directing a portion of the flow rate of the gas into a vessel channel. The gas is ignited in the channel while the remaining portion of the flow rate is directed away from the channel.
申请公布号 US7659489(B2) 申请公布日期 2010.02.09
申请号 US20070684916 申请日期 2007.03.12
申请人 MKS INSTRUMENTS, INC. 发明人 HOLBER WILLIAM M.;CHEN XING;COWE ANDREW B.;BESEN MATTHEW M.;COLLINS, JR. RONALD W.;TRULLI SUSAN C.;SHAO SHOUQUIAN
分类号 B23K10/00;H01J37/32 主分类号 B23K10/00
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