发明名称 Verfahren zur Herstellung eines Stabes aus Halbleitermaterial fuer elektronische Zwecke
摘要 Pure silicon is deposited, e.g. from a gas, on to a rod of silicon containing a doping agent so as substantially to increase the cross-sectional area of the rod whereafter the rod is zone-melted, and optionally stretched. The process of deposition, zone-melting, and stretching may be repeated. The resistivity of the silicon may increase from 0,1 to 100 ohm-cm. p-doping agents specified are aluminium, boron, and gallium. n-doping agents specified are antimony, arsenic, and phosphorus. To effect doping, the rod may be rubbed with boron, or a filament of boron-containing glass applied thereto, and the rod then zone-melted.
申请公布号 DE1719024(A1) 申请公布日期 1970.12.10
申请号 DE19591719024 申请日期 1959.09.24
申请人 SIEMENS AG 发明人 KONRAD REUSCHEL,DR.;SCHMIDT,OTTO
分类号 C30B13/04;C30B13/10;C30B25/00;D06M13/123;H01L21/00;H01L21/205 主分类号 C30B13/04
代理机构 代理人
主权项
地址