| 摘要 |
Embodiments allow for uniform die cooling or heating with a solid immersion lens equipped microscope over a larger temperature range than is currently attainable using liquid coolant. The SIL tip is insulated from the rest of the objective body to realize a controllable temperature. This thermal control may be done by convection or Joule heating. If the tip is to be cooled, cold gas may be injected through channels around the tip and fins. If the tip is to be heated, hot gas may be injected around the tip and fins 208 or an electrical heater may be thermal anchored to the tip and a current passed through it to deliver power.
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