| 发明名称 |
Self-constrained anisotropic germanium nanostructure from electroplating |
| 摘要 |
A nanostructure comprising germanium, including wires of less than 1 micron in diameter and walls of less than 1 micron in width, in contact with the substrate and extending outward from the substrate is provided along with a method of preparation. |
| 申请公布号 |
US7659200(B2) |
申请公布日期 |
2010.02.09 |
| 申请号 |
US20070620391 |
申请日期 |
2007.01.05 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COHEN GUY;HUANG QIANG;ROMANKIW LUBOMYR T.;DELIGIANNI HARIKLIA |
| 分类号 |
H01L21/302 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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