发明名称 CLAMPING UNIT AND APPARATUS FOR TRANSFERRING A DEVICE HAVING THE SAME
摘要 PURPOSE: A clamping unit and an apparatus for transferring a device having the same are provided to prevent the damage to the device by sensing the overload of device and stopping the device when receiving an overload. CONSTITUTION: A first driving unit(110) is arranged on the top of the base(101) is movable horizontally, and it lifts the base. A presser unit(120) is moved to a device by horizontal transfer of the first driving unit and clamps and pushes the device. The presser unit is slid on the base when an overload by horizontal transfer of the first driving unit is applied to the device. A sensor(130) is arranged between the base and the presser unit and senses the overload of the device. A guide member(131) guides the movement passage of the base to the presser portion in the overload while being coupled with the base.
申请公布号 KR20100013057(A) 申请公布日期 2010.02.09
申请号 KR20080074559 申请日期 2008.07.30
申请人 SECRON CO., LTD. 发明人 LIM, HYUN CHUL
分类号 H01L21/687;H01L21/677 主分类号 H01L21/687
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