| 摘要 |
<p>PURPOSE: An in-line substrate processing system is provided to improve the efficiency of the equipment by performing sequential processes without the waiting time. CONSTITUTION: Processing chambers(52,54) have one or more opening or closing units. The processing chamber installs the substrate support supporting the process substrate. The transfer chambers(32,34) are connected with the opening and closing units. The transfer chamber comprises the carrying unit for transferring the processed substrate. The processing chamber and the transfer chamber are formed alternately in the process order.</p> |
