| 发明名称 |
APPARATUS FOR TRANSFERRING A SUBSTRATE |
| 摘要 |
<p>PURPOSE: An apparatus for transferring a substrate is provided to shorten the waiting time of the mold by molding immediately the substrate while keeping a fixed temperature of the substrate. CONSTITUTION: The support plate(110) supports substrate. The base plate(120) settles the support plate. The heater(150) is included in the lower part of the support plate. The substrate is heated. The first driving unit moves the base plate in order to be transferred to substrate to the mold in which the molding progress is carried out.</p> |
| 申请公布号 |
KR20100012479(A) |
申请公布日期 |
2010.02.08 |
| 申请号 |
KR20080073887 |
申请日期 |
2008.07.29 |
| 申请人 |
SECRON CO., LTD. |
发明人 |
SEUK, DAE SU;NA, HYOUNG GUN |
| 分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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