SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a sensor with output characteristics fluctuations by energization reduced, and to provide a method of manufacturing the same.

SOLUTION: The sensor includes: a weight section; a frame positioned around the weight section; a flexible section having a diaphragm shape or a beam shape for connecting the frame and the weight section; a strain detection section which is arranged on the weight section and/or the frame to detect a physical quantity at least in one axial direction; and a wiring section which connects the strain detection section so that a bridge circuit is formed on the flexible section and the frame. A plurality of external connection pads connected to the strain detection section through the wiring section and a dummy pad which is connected to the strain detection section through the wiring section and is not used for external connection are arranged on the frame.

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