| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray tube device can carry out switching on/off of X rays irradiated on an inspection object at high speed. SOLUTION: The X-ray tube device is provided with an electron gun 101 emitting electron beams, an electrode for deflection 102 for sending out the electron beams emitted from the electron gun 101 to switch in at least two directions by receiving a control signal, and a target 110 having a first reflection surface 111 irradiating X rays toward a predetermined irradiation field in receipt of electron beams of one direction and a second reflection surface 112 irradiating X rays toward a direction different from the predetermined irradiation field in receipt of electron beams of the other direction. COPYRIGHT: (C)2010,JPO&INPIT |
