| 摘要 |
PROBLEM TO BE SOLVED: To quickly and easily acquire the amount of movement which should be applied to each inspection jig. SOLUTION: In the state where a shorting bar is held by a holding section, a controller alternately performs first processing (steps 71, 74, 76) for moving an inspection jig in its approaching direction to the holding section, and second processing (steps 72, 78) for controlling a measuring section and causing the measuring section to measure an electrical parameter, and moreover the controller moves the inspection jig in the first processing so that the inspection jig gradually approaches the holding section every time execution of the second processing is started. Moreover, when an electrical parameter value representing connection of an inspection probe with the shorting bar is measured with respect to a prescribed number of inspection probes (all inspection probes, as an example) in the second processing (step 79), the controller acquires movement amount information which enables determination of the amount of movement which should be applied to the inspection jig from an evacuation position up to an inspection position, on the basis of the position of the inspection jig in the second processing. COPYRIGHT: (C)2010,JPO&INPIT
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