发明名称 |
CONTINUOUS COATING INSTALLATION, METHODS FOR PRODUCING CRYSTALLINE SOLAR CELLS, AND SOLAR CELL |
摘要 |
A continuous coating installation is disclosed. The installation includes a vacuum chamber having a supply opening for supplying a substrate to be coated and a discharge opening for discharging the coated substrate. The installation also includes a physical vapour deposition device for coating a surface of the substrate, and a laser crystallization system for simultaneously illuminating at least one sub-partial area of a currently coated partial area of the surface of the substrate with at least one laser beam. The installation further includes a transport device for transporting the substrate in a feedthrough direction from the supply opening to the discharge opening and for continuously or discontinuously moving the substrate during the coating thereof in the feedthrough direction.
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申请公布号 |
US2010024865(A1) |
申请公布日期 |
2010.02.04 |
申请号 |
US20090538998 |
申请日期 |
2009.08.11 |
申请人 |
CARL ZEISS LASER OPTICS GMBH;CARL ZEISS SMT AG |
发明人 |
SHAH ARVIND;SCHADE HORST;MUENZ HOLGER;VOELCKER MARTIN;SCHALL MICHAEL;KRANTZ MATTHIAS |
分类号 |
H01L31/0376;C23C14/34;H01L21/20 |
主分类号 |
H01L31/0376 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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