| 发明名称 |
COMPOSITE STAMPER FOR IMPRINT LITHOGRAPHY |
| 摘要 |
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.
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| 申请公布号 |
US2010024962(A1) |
申请公布日期 |
2010.02.04 |
| 申请号 |
US20090576430 |
申请日期 |
2009.10.09 |
| 申请人 |
WD MEDIA, INC. |
发明人 |
HOMOLA ANDREW M. |
| 分类号 |
C25D5/16;G11B5/84;B29C33/38;B29C33/56;G03F7/00;G11B7/26;H01L21/027 |
主分类号 |
C25D5/16 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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