| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a charged particle beam inspection technique capable of conducting multiple inspections using one inspection device. <P>SOLUTION: A charged particle beam inspection device 1 comprises: an electron gun 41 for irradiating a sample S with an electron beam; a detector 47 for detecting a signal from the sample S; an image processing part 61 for forming an image from the signal from the detector 47; and an energy control part 65 for controlling the beam energy of the electron beam with which the sample S is irradiated. The charged particle beam inspection device 1 conducts multiple inspections, and may be a photograph projection type inspection device. A pattern defect inspection, a foreign substance inspection, and a multi-layer defect inspection are conducted. The beam energies E1, E2, E3 in these inspections have the relationships: E1>E2; and E3>E2. Before each inspection, a vacuum chamber such as a transportation chamber 9 is neutralized. <P>COPYRIGHT: (C)2010,JPO&INPIT |
