| 摘要 |
PROBLEM TO BE SOLVED: To reduce the shock when opening a container for conveying a workpiece, and suppress the particles generated at this time. SOLUTION: The upper lid 20 of a container 19 for conveying a workpiece includes a protruding part 24. A container opening/closing mechanism 30 includes a fixed shelf 33 for supporting the lower surface of the protruding part 24, a first pressing member 38 that abuts against the upper surface of a bottom plate 21, a second pressing member 39 that abuts against the upper surface of the protruding part 24, and a raising/lowering mechanism section 31 for raising/lowering them. To the container 19 for conveying a workpiece in the state of being supported by a robot hand 32, the protruding part 24 is sandwiched between the second pressing member 39 and the fixed shelf 33. The bottom plate 21 is lowered, while being sandwiched between the first pressing member 38 and the robot hand 32, so as to open/close the container. COPYRIGHT: (C)2010,JPO&INPIT
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