摘要 |
PROBLEM TO BE SOLVED: To detect a foreign matter on the material surface for an electrode such as a lithium ion battery by using an optical method, and to determine quickly a shape or a size of the foreign matter. SOLUTION: A material for an electrode conveyed by a roller is irradiated with light from the oblique upside from the conveyance direction upstream to a downstream direction by the first illumination device, to thereby acquire image data 1 of scattered light. Light is irradiated to the same measuring portion from the oblique upside from the conveyance direction downstream to an upstream direction by the second illumination device, to thereby acquire image data 2 of scattered light. In an image data processing device, since the kind of a shape of the foreign matter is determined by comparing an overall image data acquired by superimposing two kinds of acquired brightness distribution data with the image data 1, 2, the kind of the shape can be determined in a short time, to improve the accuracy of the foreign matter inspection of the material for the electrode conveyed at high speed. COPYRIGHT: (C)2010,JPO&INPIT |