发明名称 MEMORY AND METHOD OF FABRICATING THE SAME
摘要 A memory and a method of fabricating the same are provided. The memory is disposed on a substrate in which a plurality of trenches is arranged in parallel. The memory includes a gate structure and a doped region. The gate structure is disposed between the trenches. The doped region is disposed at one side of the gate structure, in the substrate between the trenches and in the sidewalls and bottoms of the trenches. The top surface of the doped region in the substrate between the trenches is lower than the surface of the substrate under the gate structure by a distance, and the distance is greater than 300 Å.
申请公布号 US2010025750(A1) 申请公布日期 2010.02.04
申请号 US20080183358 申请日期 2008.07.31
申请人 MACRONIX INTERNATIONAL CO., LTD. 发明人 CHAN YAO-FU;CHU TA-KANG;TING JUNG-CHUAN;YIH CHENG-MING
分类号 H01L21/8247;H01L27/115 主分类号 H01L21/8247
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