摘要 |
PROBLEM TO BE SOLVED: To provide a rolling diaphragm manufacturable by simple operations under a superior working environment, and capable of operating a pneumatic cylinder device having the rolling diaphragm even under a clean environment such as a clean room by surely preventing a convolution part from being caught in the pneumatic cylinder device. SOLUTION: This rolling diaphragm forming the diaphragm of a pneumatic cylinder device includes a diaphragm part 11, the convolution part 12, and a peripheral edge part 13. At least the surface of the convolution part 12 on the low pressure side is treated with a silicone resin solvent. COPYRIGHT: (C)2010,JPO&INPIT
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