发明名称 GATE DIELECTRICS OF DIFFERENT THICKNESS IN PMOS AND NMOS TRANSISTORS
摘要 By providing a gate dielectric material of increased thickness for P-channel transistors compared to N-channel transistors, degradation mechanisms, such as negative bias threshold voltage instability, hot carrier injection and the like, may be reduced. Due to the enhanced reliability of the P-channel transistors, overall production yield for a specified quality category may be increased, due to the possibility of selecting narrower guard bands for the semiconductor device under consideration.
申请公布号 US2010025770(A1) 申请公布日期 2010.02.04
申请号 US20090466748 申请日期 2009.05.15
申请人 TRENTZSCH MARTIN;WIECZOREK KARSTEN;EHRICHS EDWARD 发明人 TRENTZSCH MARTIN;WIECZOREK KARSTEN;EHRICHS EDWARD
分类号 H01L27/092;H01L21/265;H01L21/28;H01L21/8238;H01L29/51 主分类号 H01L27/092
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