发明名称 COPPER COMPOUND AND METHOD FOR PRODUCING COPPER THIN FILM USING THE SAME
摘要 The present invention provides a copper compound having a decomposition temperature in a range of 100° C. to 300° C. and including one unit or a plurality of connected units represented by the following Formula (1): [R1COO]n[NH3]mCuX1p (1) where n is 1 to 3; m is 1 to 3; p is 0 to 1; n pieces of R1 respectively represent the following Formula (2), CH2X2, CH2X2(CHX2)q, NH2, or H, and may be the same or different from each other, or n is 2 and two pieces of [R1COO] represent together the following Formula (3); R2, R3, and R4 are respectively CH2X2, CH2X2(CHX2)q, NH2, or H; R5 is -(CHX2)r-; X2 is H, OH, or NH2; r is 0 to 4; q is 1 to 4; and X1 is NH4+, H2O, or solvent molecules According to the above configuration, there are provided a copper compound capable of forming a copper thin film required for producing an electronic device or the like safely, inexpensively, and easily, and a method for producing a copper thin film using the copper compound.
申请公布号 US2010029969(A1) 申请公布日期 2010.02.04
申请号 US20090578182 申请日期 2009.10.13
申请人 MEC COMPANY LTD. 发明人 OTANI MINORU;HISADA JUN;MAWATARI TOYOKI
分类号 C07F1/08;C07F1/00;C23C18/08;H05K3/40 主分类号 C07F1/08
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