| 摘要 |
PROBLEM TO BE SOLVED: To generate a light flux having an excellent wavefront shape regardless of a polarization state of an illumination light flux. SOLUTION: A wavefront generation optical system includes a pinhole mask (14) for generating a spherical light wave, and a phase plate (16) for compensation arranged on the emission side of the pinhole mask (14). A phase shift distribution imparted to two polarized components of each mutually-different incident light by the phase plate (16) for compensation is set to be a distribution for compensating or reducing a phase shift distribution imparted to the two polarized components of the incident light by the pinhole mask (14). COPYRIGHT: (C)2010,JPO&INPIT |
