发明名称 FRACTURING METHOD AND FRACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To expand a protective tape by fracturing a filmy adhesive without large damage of a device and a protective tape. SOLUTION: A series of processes from fracturing of the filmy adhesive 1 to expansion of the protective tape 6 are divided into a process of fracturing the filmy adhesive 1 and a process of expanding the protective tape 6, wherein the relative moving speed of a frame holding means 10 and an expanding means 20 is different between both the processes such that although the frame holding means and expanding means are moved at a first fast speed V1 in the fracturing process to give all streets 2 a cue to fracture, they are moved at a second speed V2 slower than the first speed V1 in the expanding process after the tentative fracturing, thereby giving large damage to neither the device 3 nor the protective tape 6. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010027666(A) 申请公布日期 2010.02.04
申请号 JP20080183829 申请日期 2008.07.15
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUYAMA O
分类号 H01L21/301 主分类号 H01L21/301
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