| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing management system which can consolidate data related to master data, schedule management, and quality management so that those data can be shared in every production stage, without depending on working system used at each working stage of semiconductor manufacturing. <P>SOLUTION: The semiconductor manufacturing management system is configured to manage work schedule of semiconductor manufacturing based on information acquired from each working system utilized at each working stage of semiconductor manufacturing and includes: a communication unit 115 which transmits and receives data to/from each working system; a quality data management unit 111 which maintains quality data; a schedule management unit 113 which maintains progress data; and a master data management unit 112 which maintains master data which is generated at each working stage or referred from each working stage. The system maintains data of each working system in the database in a format that does not depend on each working system, and transmits and receives data to/from each working system utilizing an interface independent of each working system. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
