| 摘要 |
A capacitive force sensor (100) includes a substrate (101) having at least one electrode pair (102,103) defining a capacitance disposed thereon. The substrate (101) is fixed relative to a first plate (106). A drive circuit (104) is configured to apply a voltage relative to a circuit ground (105) to the electrode pair (102,103). The first plate (106) is separated from a second plate (107) that is coupled to circuit ground (105) by a compliance member (108,109). The compliance member (108,109) is configured to oppose a compression force (110) while allowing the first plate (106) to physically move relative to the second plate (107). A capacitive detection circuit (111) is then configured to detect a change the capacitance when the compliance member (108,109) is compressed. The compression force (110) is then determined from the change in capacitance and the spring constant of the compliance member (108,109).
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