发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>Disclosed is a semiconductor device wherein a first side wall (23A) and a second side wall (24A) are formed on a lateral surface of a gate electrode (22A).  A first high-concentration impurity region (31A) is formed in a semiconductor substrate (10) along a side of the gate electrode (22A).  A second high-concentration impurity region (32A) is formed on the outer lateral side of the first high-concentration impurity region (31A) at a position deeper than the first high-concentration impurity region.  A low-concentration impurity region (33A) is formed at a position outer than the second side wall (24A) and deeper than the second high-concentration impurity region (32A), and the low-concentration impurity region (33A) has an impurity concentration lower than those of the first high-concentration impurity region (31A) and the second high-concentration impurity region (32A).</p>
申请公布号 WO2010013404(A1) 申请公布日期 2010.02.04
申请号 WO2009JP03400 申请日期 2009.07.21
申请人 PANASONIC CORPORATION;KAMEI, MASAYUKI;AKAMATSU, SUSUMU;TAKEOKA, SHINJI 发明人 KAMEI, MASAYUKI;AKAMATSU, SUSUMU;TAKEOKA, SHINJI
分类号 H01L29/78;H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/417 主分类号 H01L29/78
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