发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p>Disclosed is a semiconductor device wherein a first side wall (23A) and a second side wall (24A) are formed on a lateral surface of a gate electrode (22A). A first high-concentration impurity region (31A) is formed in a semiconductor substrate (10) along a side of the gate electrode (22A). A second high-concentration impurity region (32A) is formed on the outer lateral side of the first high-concentration impurity region (31A) at a position deeper than the first high-concentration impurity region. A low-concentration impurity region (33A) is formed at a position outer than the second side wall (24A) and deeper than the second high-concentration impurity region (32A), and the low-concentration impurity region (33A) has an impurity concentration lower than those of the first high-concentration impurity region (31A) and the second high-concentration impurity region (32A).</p> |
申请公布号 |
WO2010013404(A1) |
申请公布日期 |
2010.02.04 |
申请号 |
WO2009JP03400 |
申请日期 |
2009.07.21 |
申请人 |
PANASONIC CORPORATION;KAMEI, MASAYUKI;AKAMATSU, SUSUMU;TAKEOKA, SHINJI |
发明人 |
KAMEI, MASAYUKI;AKAMATSU, SUSUMU;TAKEOKA, SHINJI |
分类号 |
H01L29/78;H01L21/28;H01L21/336;H01L21/8234;H01L21/8238;H01L27/088;H01L27/092;H01L29/417 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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